Oxidizing Silicon Membranes for MEMS Applications

Student’s name: Tristan Burnham Home Institution: Boise State University NNCI Site: MONT @ Montana State University REU Principle Investigator: Dr. Wataru Nakagawa - Department of Electrical Engineering, Montana State University REU Mentor: Dr. Andrew Lingley - Department of Electrical Engineering, Montana State University Abstract: Microelectromechanical Systems (MEMS) are crucial components to modern everyday devices, such as microphones, pressure sensors, and actuators. A variety of MEMS devices contain mechanical components like silicon membranes, which have characteristics that allow for MEMS functionality. In this experiment, membranes of varying dimensions were fabricated using tetramethylammonium hydroxide (TMAH) and subjected to thermal oxidation to assess their structural integrity. Contributing factors that would affect membrane integrity, such as uniform oxide growth and membrane thickness, width, and shape, were thoroughly tested. Subsequent results will be used to guide the creation of a generalized fabrication process which supports the creation of various MEMS devices. This process will be incorporated into a design and fabrication course at Montana State University.